Study on Anodizing Processes for formation of Nano porous Aluminum oxide Thin Films

摘要

In this paper aluminum oxide thin film was prepared by anodic oxidation in various acid baths such as sulphuric acid, chromic acid and phosphoric acid with different concentrations. The thickness and appearance of the anodized films formed has been compared. The thicknesses of anodic oxide film, coating weight per unit area and coating ratio of anodic oxide film variation were determined with respect to the different electrolyte concentrations by using the thickness determination formula. Sulphuric acid gives the highest thickness aluminum oxide films, in the operation condition of 15% H2SO4 solution composition, 15V, 30±2°C, 100 mA, 60 mins.