Silica Aerogel Can Capture Flying Particles in EUV Tools - (PPT)

摘要

1. Properties and behavior of particles in vacuum (1). Materials (2). Velocities (3). Flying range 2. Characteristics of silica aerogels (1). Silica aerogel as particle catcher (2). Structure of silica aerogels (3). Outgassing rate ofls 3. Particle capture performance of silica aerogels (1). Experimental setup (2). Experimental conditions (3). Experimental results.