Fiducial Mark requirements from the viewpoints of EUV Actinic Blank Inspection tool for phase defect mitigation - (PPT)

摘要

FH recommendations are: ML etched; > 100 nm line depth; 3-5 μm-line width. ABI tool is required to equip Magnified Optics to achieve < 10 nm (3σ) error for mitigation (position & size). We need further optimization of FH for the MO of LT ABI tool.