Development of a Spectral Purity Filter for CO_2 Laser Produced Plasma based on magnetized plasma confinement of absorbing gases - (PPT)

摘要

Gas filters have potential to reduce unwanted radiation from EUV sources; Infrared absorbing gases such as SF_6 can suppress 10.6 μm radiation; Confinement of SF_6 can be accomplished using gas jets or with more improvement with low density plasma arcs.