A dynamic model is presented to simulate the motion characteristics of an inchworm linear piezomotor. With the consideration of the sequential motions of the piezoelectric actuators in the piezomotor, the model handles the piezomotor as a two degree-of-freedom dynamic system with varying interface stiffness and damping coefficient. It incorporates the electro-mechanical coupling effect into its governing equations. The model is demonstrated using Co-quad plots, bode plots and root locus techniques, and verified by an experimental study. It turns out that the model can precisely predict the motion behavior of the linear piezomotor. The model can be used to improve the performance of the existing linear piezomotors and to help design new linear piezomotors. The capabilities of the linear piezomotor are also identified by the experimental study, which indicates that the piezomotor has positioning resolution of 5 nm, positioning speed of 20 mm/s, and output force of 220 N.
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