Evaluation of organic gaseous contaminants in clean room (Part 4)

摘要

We have practiced the "Si Chip Adsorber Tube Method" that sucks air in the target environment through a glass tube packed with Si wafer chips. The advantage of this method over natural exposure is the shorter measurement time. However, as the cutting plane is exposed in addition to the silicon surface, there is concern that the adsorption characteristics by this method may differ from other methods that use only the surface of the silicon wafer. In this report, we studied the difference in the adsorption of organic gaseous molecules between wafer surface and cross section, analyzed the adsorption characteristics of the "Si Chip Adsorber Tube Method" and obtained the following findings. The cross section in the Si chip adsorber had (110) crystal structure and differed from the (100) structure of the wafer surface. Molecular simulation indicated that the organic molecules in this research were adsorbed in the same way both on the surface and on the cross section.