MECHANICAL AND ELECTRICAL PROPERTIES OF Al_2O_3 THIN FILMS ON METALS, CERAMICS AND RESINS PREPARED BY AEROSOL DEPOSITION METHOD

摘要

Large sized Al_2O_3 thin films with over 10 mu m thickness were fabricated by aerosol deposition method (ADM) on various substrates without substrate heating. Vickers hardness and dielectric breakdown voltage of the films on metal substrates exceeded 1400 Hv and 150 V/mu m, respectively. Flow velocity of the Al_2O_3 particles was found to have an influence on the hardness of the films. It was also possible to fabricate Al_2O_3 films on soda-lime glass and resin substrates.