Futures of microcavity to distribute high-frequency clock over than 10GHz

摘要

We have proposed a novel method of using a microcavity for high frequency clock in ULSI systems. This method can distribute clock signals over than lOGHz without jitter and EMI noise. The microcavity has thin thickness in depth about 5um and affected by energy dissipation on cavity walls. Considering the effect of energy dissipation, we formulate an electro-magnetic wave using a finite element method (FEM) of vector interpolation function. Applying this method we discuss the features of a microcavity system.