An analytical method is presented to optimize the dimensions of a high precision planar actuator. As the distribution of the stator current have different contributions to the driving force but the heat loss due to these currents are same. It is reasonable to optimize the depth of the stator current sheet. The minimal of the heat loss and the maximal of the force density is proposed as the design objectives. Two analytical expressions are established to reveal the relationship between the design objectives and the electromechanical parameters. This design method is general to other coreless electrical motors or actuators because the basic principle of optimization is the same.
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