Nanotubes and Nanorods on CMOS Substrates for Gas Sensing

摘要

In this paper we discuss the combined use of integrated CMOS microhotplates employing nanomaterial sensing layers for intelligent, compact gas sensors with increased sensitivity, selecitivity and fast response times. We first review the status of nanomaterial-based gas sensors, their operating principles, discussing growth issues and their compatbility with CMOS substrates. We then describe Multiwall (MW) Carbon Nanotubes (CNTs) and ZnO Nanowires (NW) growth/deposition onto CMOS microhotplates. The paper continues by discussing the response of these nanomaterial sensing layers to vapours and gasses. Finally we discuss the future prospects of nanomaterial-based CMOS gas sensors, highlighting on one hand their future potential and on the other hand their present shortcomings and future challenges that need to be addressed before they can be released commercially.