THERMOPNEUMATIC-ACTUATED PDMS MICRO VALVE AND MICROPUMP INTEGRATED WITH THE SAME FABRICATION PROCESS

摘要

We proposed a new PDMS microfluidic system including microvalves and micropump that are easily integrated on the same substrate with the same process steps. The pumping rate of fabricated microfluidic system was measured under various frequency and duty-ratio of applied power. The maximum pumping rate of about 26 nl/min is measured under the duty ratio of 1% at 2 Hz of the applied pulse voltage. The dynamic response of the microvalve in the microfluidic system is measured under the on/off alternation with the applied power of 100 mW.