We have developed a bulk-micromirror with a high fill-factor by using a simple process. By using an asymmetical mirror structure, a newly designed "fishbone-shaped" vertical comb actuator, and a new mirror frame that enables a narrow pitch, we developed a dual-axis micromirror array with the narrow pitch of 250 microns and high fill-factor of 80%. The fabricated micromirror provides a large rotation angle, for example, 6 degree for the X axis and 2 degree at 200-V for the Y axis. The resonance frequencies for both axes are approximately 3 kHz.
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