Study on Performance of Micro-friction and Its Control in MEMS

摘要

Friction, wear and lubrication in microscopic dimensions play a decisive role in the performance, stability and longevity of the entire MEMS system. At the micro-nano scale, surface effects will replace the inertial effect as the dominant factor. Until now, there is no simple and reliable formulas to quantify the friction behavior in MEMS systems. The mechanical properties of micro-friction are discussed in this paper, the aim of this research is to establish the simpler friction calculation formulas which based on the contact interface barrier theory and statistical methods to characterize and quantify the behavior of two nominal horizontal random rough surface contacts, then simplify the calculation of complex force system in MEMS. Under certain conditions, the calculation results of the KE model are in good agreement with ours. In addition, the friction control in MEMS is also discussed.