Development of optical six-axial force sensor and its signal calibration considering nonlinear interference

摘要

A six-axial force sensor using the optical measuring technique and its nonlinear calibration method are proposed. The force sensor is based on a unit which has a small light source set face to face with a photosensor of the quarter-splitting type to measure minute displacements in two directions with respect to each other. Three sets of the unit are held by an elastic frame. The sensor, in comparison with the conventional strain-gauge-based device, is more compact, light in weight, low in cost, and accurate. The high accuracy of the sensor comes from the calibration method in which nonlinear interferences of six-axial force are considered. An experimental setup in which the six-axial force sensor could be simultaneously input with plural axial forces was produced, and the proposed calibration method was shown to be valid.