Design and analysis of MEMS sensor

摘要

In order to measure the ultra small pressure, a two-island beam membrane structure which has the ability of anti-overload and a high sensitivity is designed in this paper. Theoretical analysis is carried out; it is found that the stress in the edge is maximum. The finite element analysis is carried out by means of ANSYS. The results show that the extreme stress exists in the grooves of the center and edge. Resistors are placed on the grooves to compose a full bridge, which can make the voltage output of the circuit reach the maximum. The sensitivity can reach the maximum.