首页>
外国专利>
SELF TEST OF A MEMS GYROSCOPE HAVING AN ASIC INTEGRATED CAPACITOR CAPABLE OF SIMPLIFYING THE DESIGN OF A MEMS SENSOR
SELF TEST OF A MEMS GYROSCOPE HAVING AN ASIC INTEGRATED CAPACITOR CAPABLE OF SIMPLIFYING THE DESIGN OF A MEMS SENSOR
展开▼
机译:具有可简化MEMS传感器设计的ASIC集成电容器的MEMS陀螺仪自测
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: A self test of a MEMS gyroscope having an ASIC integrated capacitor is provided to reduce the number of components and contact points of a circuit needed to a MEMS sensor.;CONSTITUTION: A device includes a MEMS gyroscope sensor with first and second sensing capacitors and an integrated circuit (110). The integrated circuit includes a switch circuit and a capacitance measuring circuit. The switch circuit electrically disconnects the first sensing capacitor from a first input unit and electrically connects the second sensing capacitor to a second input unit. The capacitance measuring circuit measures the capacitance of the second sensing capacitor of the MEMS gyroscope sensor while first electrical signals are applied to a disconnected first electric capacitance element.;COPYRIGHT KIPO 2013;[Reference numerals] (125) 90-degree phase shift
展开▼