Implementation of an effective defect inspection system in a multi product foundry: SM: Smart manufacturing, CFM: Contamination free manufacturing, DI: Defect inspection and reduction, FA: Factory automation/optimization

摘要

Defect Inspection as a part of yield learning and Improvement has been a critical part for the enormous progress of semiconductor manufacturing to ensure quality and high yield. For a Multi Product Foundry, challenges arise when quality and high yield will be set in all products. This paper describes the successful implementation of a cost effective Defect Inspection System for a multiproduct foundry. It outlines the defect inspection tool setting, the yield data management to handle the generated data, methodologies to work effectively with a multi product line and future plans.