DiagBridge: Analyzing scan diagnosis data in a yield perspective

摘要

In this work, we described a powerful volume diagnosis and yield analysis framework called DiagBridge. DiagBridge enhances volume diagnosis results with sort and design data so as to present the volume diagnosis results in easy-to-understand metrics like yield loss estimation and failure rate estimation. We are already sharing these results with cross-functional teams and seeing various functional teams taking corrective actions to improve yield and reduce yield-limiting factors. Such systems further enables straight-forward comparisons and significantly improves the efficiency in logic yield ramping.