Multiple wavelength laser induced damage of multilayer beam splitters

摘要

Experimental and theoretical progress on multiple wavelength laser induced damage of multilayer beam splitters is reviewed. Test method for multiple lasers-induced damage thresholds were proposed based on ISO 11254. Single and multiple laser-induced damage performance of the splitters, including damage probabilities, damage thresholds and damage morphologies, were investigated respectively in order to obtain better understanding of the damage mechanism at 355, 532 and 1064 nm. A judgment criterion for coupling effect of different lasers in inducing damages was proposed and the detailed coupling efficiency was also obtained. The small absorbing particle model and defect statistical model were put forward to explain the experimental results. In addition, damage performance when the lasers arrived at the films with nanosecond-delay in time was researched. Generally, the third harmonics play a key role in the damage initiation.