Device for homogenizing partially coherent laser light, comprises polarization sensitive beam influencing unit and lens array with multiple lenses, where laser light is split in multiple partial beams by lenses of lens array

摘要

The device comprises a polarization sensitive beam influencing unit (9,10) and a lens array (3) with multiple lenses (6,7). A laser light (2) is split into multiple partial beams by the lenses of the lens array. A superimposition unit is arranged behind the lens array for superimposing the individual partial beams in a working level (5).