Modeling of power devices with Drift Region Integrated Microchannel Cooler

摘要

This paper introduces the DRIMCooler — an innovative concept allowing to locate the heat exchanger directly inside the active region of a vertical power device. Based on vertical edge termination technique and the use of dielectric coolant fluid circulation, arrays of through wafer channels are drilled in the silicon substrate offering a large heat exchange coefficient while minimizing the pressure drops. The concept is introduced and discussed with respect to technological and electrical points of view. Thermal and fluidic issues are analyzed with numerical models and simulations. The obtained results show excellent thermal and hydraulic performances of the DRIM Cooler.