Micromachined arrays of air-bridge GaAs Schottky diodes for THz cameras

摘要

We present the fabrication and test of arrays of GaAs Schottky diodes with sub-micrometric junction area and negligible parasitic capacitances working as rectifying detectors at sub-THz frequencies. GaAs Micromachining techniques are used to decrease the cross talking between adjacent diode detectors.