A new technology was developed for the construction and hermetic encapsulation of chip-size secondary lithium-ion batteries on a wafer-level plane. To reduce the size of the package and improve the handling and assembly of miniature batteries, we established a wafer-level process that combines foil processing of Li batteries and wafer technologies for battery contacts and encapsulation. Parylene and thin-film metal deposition was used for hermetic encapsulation of the batteries. With this technology, battery sizes between 1 mm2and 1 cm2, and as thin as 250 µ m, can be fabricated. A discharge capacity of 860 Ah/cm2was achieved with secondary lithium wafer-level batteries. The proportion of active material is thus increased to over 70%, despite the system’s very flat structure. The impact of the formation procedure on the battery performance was investigated. Electrical charge and discharge cycling tests have been carried out. The presented technology allows the transformation of the high energy density of cylindrical or prismatic cells to integrated micro batteries.
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机译:开发了一种新技术,用于在晶片级平面上构造和密封芯片尺寸的二次锂离子电池。为了减小包装尺寸并改善微型电池的处理和组装,我们建立了一种晶圆级工艺,该工艺将锂电池的箔处理与用于电池接触和封装的晶圆技术相结合。聚对二甲苯和薄膜金属沉积被用于电池的气密封装。利用这种技术,可以制造尺寸在1 mm 2 sup>和1 cm 2 sup>之间的电池,并且薄至250 µm。二次锂晶片级电池的放电容量达到860 Ah / cm 2 sup>。尽管系统非常扁平,但活性材料的比例因此增加到了70%以上。研究了形成步骤对电池性能的影响。已经进行了充电和放电循环测试。提出的技术允许将圆柱形或方形电池的高能量密度转换为集成微型电池。
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