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Pb-free Solder Paste Reflow Window Study for Flip Chip Wafer Bumping

机译:倒装芯片晶圆凸起的无铅焊膏回流窗口研究

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A 2x3 full factorial experimental design was used to study the effects of peak reflow temperature (235℃ - 265℃) and time-above-liquidus (40-60 sec.) on bump characteristics. Ultra-fine mesh (Type 5, -500/+650) Pb-free solder pastes, including Sn96.5Ag3.5, Sn95.5Ag3.8Cu0.7, and Sn99.3Cu0.7 were used on electroless NiP/Au Under Bump Metallurgy (UBM). Belt speed and zone temperature settings of a reflow furnace were used to obtain the desired profiles. A linear ramp profile, with ramp rate of 1.5℃/sec was selected after initial profile screening experiments. The reflowed solder bumps were characterized in several categories to obtain an optimal reflow window. These categories included wetting characteristics, solder bump shear strength, shear failure mode, flux residue cleanliness, solder void population, and void size. The lowest peak reflow temperature and time-above-liquidus were established for each solder alloy. A low peak temperature reflow (cooler profile) resulted in fewer and smaller voids in the solder bump than a high temperature, long time-above-liquidus reflow condition. Bump shear strength was consistent for a wide range of reflow conditions. All of three Pb-free solders have a very wide reflow process window to produce bumps with good solder/UBM integrity and uniform bump geometry.
机译:使用2x3全因子实验设计来研究峰值回流温度(235℃-265℃)和液相线以上时间(40-60秒)对凸点特性的影响。用于化学镀NiP / Au凸点上的超细网状(类型5,-500 / + 650)无铅焊膏,包括Sn96.5Ag3.5,Sn95.5Ag3.8Cu0.7和Sn99.3Cu0.7冶金学(UBM)。使用回流炉的皮带速度和区域温度设置来获得所需的轮廓。经过初步的轮廓筛选实验后,选择了线性斜率曲线,斜率为1.5℃/ sec。回流焊的焊料凸点分为几类,以获得最佳的回流窗口。这些类别包括润湿特性,焊料凸块的剪切强度,剪切破坏模式,焊剂残留物的清洁度,焊料空位填充和空位尺寸。为每种焊料合金确定了最低的峰值回流温度和液相线以上时间。与高温,液相线以上长时间回流相比,低峰值温度回流(较冷的曲线)导致焊料凸点中的空隙越来越少。凸点剪切强度在各种回流条件下均保持一致。三种无铅焊料均具有非常宽的回流工艺窗口,可生产出具有良好焊料/ UBM完整性和均匀凸块几何形状的凸块。

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