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Process Enhancements for Negative Tone Development (NTD)

机译:负音开发(NTD)的过程增强

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摘要

The negative tone development (NTD) process has proven benefits for superior imaging performance in 193nm lithography. Shrink materials, such as AZ~® RELACS~® have found widespread use as a resolution enhancement technology in conventional 248nm (DUV), 193 run dry (ArF) and 193 nm immersion (ArFi) lithography. Surfactant rinses, such as AZ~® FIRM~® are employed as yield enhancement materials to improve the lithographic performance by avoiding pattern collapse, eliminating defects, and improving CDU. This paper describes the development and recent achievements obtained with new shrink and rinse materials for application in NTD patterning processes.
机译:负色调显影(NTD)工艺已证明可在193nm光刻技术中获得出色的成像性能。在传统的248nm(DUV),193nm干法(ArF)和193nm浸没(ArFi)光刻中,诸如AZ〜®RELACS®之类的收缩材料已被广泛用作分辨率增强技术。表面活性剂冲洗液(例如AZ〜®FIRM〜®)被用作提高良率的材料,可避免图案塌陷,消除缺陷并改善CDU,从而提高光刻性能。本文介绍了用于NTD图案化工艺的新型收缩和冲洗材料的发展以及最近取得的成就。

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  • 来源
    《Alternative lithographic technologies V》|2013年|86802E.1-86802E.8|共8页
  • 会议地点 San Jose CA(US)
  • 作者单位

    AZ Electronic Materials Manufacturing (Japan) KK 3330 Chihama, Kakegawa-shi, Shizuoka, 437-1412 Japan;

    AZ Electronic Materials Manufacturing (Japan) KK 3330 Chihama, Kakegawa-shi, Shizuoka, 437-1412 Japan;

    AZ Electronic Materials Manufacturing (Japan) KK 3330 Chihama, Kakegawa-shi, Shizuoka, 437-1412 Japan;

    AZ Electronic Materials Manufacturing (Japan) KK 3330 Chihama, Kakegawa-shi, Shizuoka, 437-1412 Japan;

    AZ Electronic Materials Manufacturing (Japan) KK 3330 Chihama, Kakegawa-shi, Shizuoka, 437-1412 Japan;

    AZ Electronic Materials Manufacturing (Japan) KK 3330 Chihama, Kakegawa-shi, Shizuoka, 437-1412 Japan;

    AZ Electronic Materials Manufacturing (Japan) KK 3330 Chihama, Kakegawa-shi, Shizuoka, 437-1412 Japan;

    AZ Electronic Materials Manufacturing (Japan) KK 3330 Chihama, Kakegawa-shi, Shizuoka, 437-1412 Japan;

    AZ Electronic Materials Manufacturing (Japan) KK 3330 Chihama, Kakegawa-shi, Shizuoka, 437-1412 Japan;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Lithography; NTD process; shrink; rinse; resolution enhancement; yield enhancement;

    机译:平版印刷; NTD过程;收缩;冲洗;分辨率增强;增产;

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