Towards athermal nanoplasmonic resonators based on Cu-Tio2-Si hybrid plasmonic waveguide

摘要

Owing to the negative thermo-optic coefficient (TOC) of titanium dioxide, the real effective modal index of Cu-TiO2-Si hybrid plasmonic waveguides can be potentially temperature independent. High-performance Cu-TiO2-Si waveguide-ring resonators (WRRs) are experimentally demonstrated on SOI platform using standard CMOS technology. TOC of the group index is measured to be ∼1.09×10⁻⁴ K⁻¹ for a WRR with 220-nm-high Si core and 58-nm-thick TiO2. TOC of the as-deposited TiO2 is estimated to ∼ −1.0×10⁻⁴ K⁻¹.