Effects of High Pressure Water Vapor Annealing on Photoluminescent and Structural Properties of Nano-Structured ZnO/ZnMgO Multiple Layers Prepared by Radio Frequency Magnetron Sputtering

摘要

ZnO/ZnMgO heterostructured films were fabricated on quartz glass substrate by radio frequency magnetron sputtering. The photoluminescent and structural properties of the films after annealing in a water vapor combing with a H_2 reducing ambient at a low temperature were investigated. A widened visible emission peak was observed from the films after water vapor post-treatment, companied with nano-rods formation. The crystallinity of the ZnO/ZnMgO heterostructures was significantly enhanced with the water vapor treatment.