Research and Application of Micro-nano Thin Films Generated by Ion Beam Assisted Deposition (IBAD)

摘要

Research and Application of Micro-nano Thin Films Generated by Ion Beam Assisted Deposition (IBAD)Jinsheng Liu.This paper from the following aspects were introduced:1. Important research achievement;2. The main theoretical monographs;3. Publications.such asa. Ion Beam Technology and Applications (1995);b. Ion Beam Deposition of Thin Films and Applications (2003);c. Thin Film Formation Process and Structure (2005);d. Introduction to the characteristics of hard amorphous carbon (2007).