Faculty of Post Graduate National Institute of Science and Technology Jakarta 12640 Indonesia;
Leibniz Institute of Surface Engineering (IOM) Permoserstrasse 15 D-04318 Leipzig Germany;
Leibniz Institute of Surface Engineering (IOM) Permoserstrasse 15 D-04318 Leipzig Germany;
Leibniz Institute of Surface Engineering (IOM) Permoserstrasse 15 D-04318 Leipzig Germany;
Ion Beam Assisted Deposition; Hexagonal GaN Thin Film; SEM; Quantum Design Physical Properties Measurement System; RHEED;