Titanium nitride ceramic thin films on 317L stainless steel(SS317L) substrate were deposited by Ion Beam Assisted Deposition (IBAD). The composition of the TiN films were investigated by Auger electron spectroscopy(AES), while the preferential orientation of the deposited film and phase composition were determined by X-ray diffraction(XRD). Adhesion was measured through Micro Scratch Tester(MST), and the corrosion resistance was evaluated by the electrochemical corrosion experiments in Hamk’s simulated human plasma. Specially, the biocompatibility of SS317L and TiN thin films were studied with fibroblast and marrow cell cultures in vitro. The results show that TiN thin films deposited on SS317L by means of IBAD can make remarkable changes on the structure and properties of the surface. At 37℃ Hank’s simulated plasma, free corrosion potential (E corr ) and breakthrough potential of pitting corrosion (E b) were both improved by coating TiN films . The culture results show that ion beam assisted TiN coatings exhibit a higher degree of cytocompatibility than that of SS317L and the cells grow better on those proper rough surfaces.
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