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METHOD FOR MANUFACTURING THIN FILMS BY UTILIZING SHORT LASER PULSES AND COMPOSITE TARGET MATERIALS

机译:利用短的激光脉冲和复合目标材料制造薄膜的方法

摘要

The present invention prepares tight and porous coatings from metallic, ceramic and organic materials by utilizing composite targets made of two or several materials that have been disassembled, and can be coated by utilizing short laser pulses directed to the target material. A method for creating in this way a flow of material towards an object is shown. By means of the method it is possible to create material structures in a controlled manner, to minimize the required energy of laser pulses and heat generation, and by means of the method to improve productivity by precisely selecting components for the target material It is also possible to do
机译:本发明通过利用由两种或多种已经拆卸的材料制成的复合靶制备金属,陶瓷和有机材料的紧密和多孔涂层,并且可以通过利用针对靶材料的短激光脉冲来涂覆。 以这种方式形成以这种方式形成朝向物体的材料流动。 借助于该方法可以以受控的方式产生材料结构,以最小化激光脉冲和发热的所需能量,并且通过精确选择用于目标材料的组件来提高生产率的方法也是可能的 去做

著录项

  • 公开/公告号KR102343249B1

    专利类型

  • 公开/公告日2021-12-24

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR1020177018127

  • 发明设计人 리마타이넨 자리;켁코넨 빌리;

    申请日2015-12-04

  • 分类号C23C14/28;C23C14/56;H01M10/052;H01M4/04;H01M50/40;

  • 国家 KR

  • 入库时间 2022-08-24 23:02:32

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