Mechanical Properties of Ferroelectric Composite Thin Films Fabricated by the Pulsed Laser Deposition Method

摘要

Barium strontium titanium oxide (BSTO) ferroelectric films of various nominal thicknesses were deposited by the pulsed laser deposition (PLD) technique on single crystals of sapphire at substrate temperatures varying from 30 to 700 deg C. X-ray analysis showed that the thin films were amorphous up to 500 deg C, while at 700 deg C, they were polycrystalline. The microstructure of the thin films was columnar at all substrate temperatures. The film microhardness increased with increasing substrate temperature. While the cohesion failure load of the films remained fairly constant, the adhesion failure load increased with increasing substrate temperature.