SAFETY SYSTEM FOR NEEDLE PROBE CARD FOR HIGH-VOLTAGE AND HIGH-CURRENT TEST ON POWER SEMICONDUCTOR DEVICES, RELATED TEST MACHINE AND CORRESPONDING TESTING METHOD

摘要

Safety system (3) for needle probe cards (2) for test machines (1) for high-voltage and high- current testing of power semiconductor electronic devices, e.g., IGBTs, MOSFETs and/or FRDs; the needle probe card (2) comprising a plurality of needles (N) adapted to be placed in contact with a device under test (DUT), each needle (N) being adapted to allow the flow of an electric current; the safety system (3) comprising: a control unit (32) capable of determining the current flowing in every single needle (N), and a plurality of switching devices (34) adapted to selectively interrupt the current flowing in said needles (N); at least one switching device (34) is associated with each needle (N) of said needle probe card (2); said processing unit (32) being adapted to drive every single switching device (34) in order to selectively interrupt the flow of current in the corresponding needle (N).