A composition for drying an uneven pattern, and a method for manufacturing a substrate having an uneven pattern on the surface

摘要

The composition for drying concave-convex patterns of the present invention comprises a sublimable material and a solvent having a boiling point of at least 5°C lower than the boiling point or sublimation point of the sublimable material at 1 atm, and a boiling point of 75°C or less at 1 atm. will include