Method for removing halogen fluoride and quantitative analysis method and quantitative analysis apparatus of contained gas component in halogen fluoride mixed gas

摘要

Problem to be solved: to provide an efficient removal method of halogen fluoride containing bromine or iodine contained in the mixed gas. The present invention also provides a quantitative analysis method capable of efficiently and accurately quantifying impurity components such as oxygen, nitrogen, carbon dioxide and tetrafluoromethane in halogen fluoride.A method of removing a halogen fluoride in the mixed gas by reacting a mixed gas containing a halogen fluoride containing bromine or iodine and a removing agent, wherein the removing agent is a chloride of potassium, sodium, magnesium, calcium and barium A method of bromide or iodide.A mixed gas containing halogen fluoride and other gaseous components and a removing agent are reacted to remove the halogenide fluoride in the mixed gas and remove the generated by-product, then Quantitative analysis method of gas content in halogen fluoride mixture gas characterized by gas chromatograph.