PROCESS MONITORING DEVICE, PROCESS MONITORING METHOD, AND PROGRAM

摘要

Provided are a process monitoring device, a process monitoring method, and a program which can eliminate/add data acquired by a specific sensor from/to a monitoring/diagnosis target, without reconstructing a diagnosis model. A process monitoring device of an embodiment comprises a data collection unit, a statistical amount calculation unit, and a total statistical amount calculation unit. The data collection unit acquires two or more variables indicating a state of a monitoring target. The statistical amount calculation unit outputs respective statistical amounts for all combinations obtained by selecting two variables from the acquired variables. The total statistical amount calculation unit outputs a total statistical amount indicating the state of the monitoring target on the basis of the statistical amount output by the statistical amount calculation unit.