VIBRATION COMPONENT MEASUREMENT DEVICE, KELVIN PROBE FORCE MICROSCOPE, AND VIBRATION COMPONENT MEASUREMENT METHOD

摘要

In order to increase the frequency of an alternating-current signal applied between a vibration part and a sample up to the same order as the vibration frequency of the vibration part when measuring a vibration component of the vibration part, a vibration component measurement device (2) comprises a vibration part (4), a first alternating-current signal generator (20) for generating a first alternating-current signal, a second alternating-current signal generator (44) for generating a second alternating-current signal having a frequency that is greater than one and less than two times, or greater than two and less than three times, the frequency of the first alternating-current signal, signal application unit (14, 56) for applying the second alternating-current signal between the vibration part and the sample (X), a vibration control unit (10) for causing the vibration part to vibrate, and measurement units (16, 18, 20, 22, 42, 44, 50) for measuring a fluctuation component of vibration of the vibration part which fluctuates due to interaction between the vibration part and the sample.