SCANNING PROBE MICROSCOPE, MEASUREMENT METHOD USING SAME, AND KELVIN FORCE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a measurement method that uses a scanning probe microscope having high quantitative precision, and to provide the scanning probe microscope.;SOLUTION: The measurement method, using the scanning type probe microscope comprises a process of measuring the physical property values of a reference sample 20 by detecting the physical quantity, acting between a probe 116 and the reference sample 20; a process of calculating measurement errors in the measured result obtained from the process of measuring the physical property values of the reference sample 20; a process of measuring the physical property values of a sample 4, by detecting physical quantity operating between the probe 116 and the sample 4; and a process of correcting the measured result, obtained from the process for measuring the physical property values of the sample 4, based on the measurement errors.;COPYRIGHT: (C)2006,JPO&NCIPI