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Method for preparing covellite thin film by radio frequency magnetron sputtering method and thin film solar cell using thereof
Method for preparing covellite thin film by radio frequency magnetron sputtering method and thin film solar cell using thereof
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机译:用射频磁控溅射法和薄膜太阳能电池用射频薄膜制备木质薄膜的方法
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摘要
The present invention relates to a method for manufacturing a kobelite thin film using radio frequency magnetron sputtering and to a thin film solar cell using the kobelite thin film manufactured by the method, and more particularly, to a hexagonal system using a high frequency magnetron sputtering method. ) to prepare a CuS (copper sulfide) thin film having a crystal structure and (110) plane preferential growth orientation, and using this, significantly improved open-circuit voltage (Voc) and short circuit current density (Jsc) ), a fill factor (FF) and a power conversion efficiency (PCE).
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