TFT substrate including barrier layer including silicon oxide layer and silicon silicon nitride layer, Organic light-emitting device comprising the TFT substrate, and the manufacturing method of the TFT substrate

摘要

The present invention provides a first plastic layer comprising polyimide; a first barrier layer positioned on the first plastic layer; a first intermediate layer disposed on the first barrier layer and in direct contact with the first barrier layer; a second plastic layer disposed on the first intermediate layer and in direct contact with the first intermediate layer, the second plastic layer including polyimide; a TFT layer and an organic light emitting device positioned on the second plastic layer; and an encapsulation thin film encapsulating the organic light emitting device, wherein the first intermediate layer includes at least one of an amorphous material, a metal thin film, and a metal oxide thin film, and the encapsulation thin film includes the TFT layer and the organic light emitting device The organic light emitting diode display device overlaps the first plastic layer, the first barrier layer, the first intermediate layer, and the second plastic layer from the outside.