Facility abnormality analysis system, facility abnormality analysis method and program

摘要

PROBLEM TO BE SOLVED: To provide a facility abnormality analysis system, a facility abnormality analysis method, and a program, capable of reducing the labor, shortening the period, and suppressing the overlooking, in discovering a facility possibly having lot failure.SOLUTION: Provided are storage units 11 and 12 configured to have an area for storing in advance facility information including at least information specifying a lot to which a facility 50 belongs and an area for storing failure information that is information on a failure of the facility 50 having been input, a calculating unit 32 configured to calculate a failure rate in the predetermined facility 50 based on the facility information and failure information and a model to be used as a criterion for determining the possibility of lot failure having occurred in a lot to which the predetermined facility 50 belongs, which can be obtained based on the failure information on the predetermined facility 50, and a determination unit 33 configured to determine the possibility of lot failure having occurred in the lot to which the predetermined facility 50 belongs by comparing the calculated failure rate and the model.SELECTED DRAWING: Figure 1