首页> 外国专利> DISTRIBUTION ANALYSIS METHOD AND SYSTEM, ABNORMALITY FACILITY ESTIMATION METHOD AND SYSTEM, PROGRAM FOR CAUSING COMPUTER TO EXECUTE ITS DISTRIBUTION ANALYSIS METHOD OR ITS ABNORMALITY FACILITY ESTIMATION METHOD, AND RECORDING MEDIUM READABLE BY COMPUTER HAVING ITS PROGRAM RECORDED THEREIN

DISTRIBUTION ANALYSIS METHOD AND SYSTEM, ABNORMALITY FACILITY ESTIMATION METHOD AND SYSTEM, PROGRAM FOR CAUSING COMPUTER TO EXECUTE ITS DISTRIBUTION ANALYSIS METHOD OR ITS ABNORMALITY FACILITY ESTIMATION METHOD, AND RECORDING MEDIUM READABLE BY COMPUTER HAVING ITS PROGRAM RECORDED THEREIN

机译:分布分析方法和系统,异常便利性估计方法和系统,使计算机执行其分布分析方法或其异常便利性估计方法的程序,并记录计算机可读取的介质,并记录其程序

摘要

PROBLEM TO BE SOLVED: To provide a distribution analysis method and system for evaluating whether or not analysis target data having such a characteristic as distributed along a plane are similar to a specific distribution shape pattern, which can always provide a good accurate evaluation even when the analysis target data are varied by various factors.;SOLUTION: A distribution shape pattern is divided into a plurality of rectangular sections in the form of a grid for a plane of defined analysis target data, and a density value capable of taking a multiple value in a certain numeral range is defined for each of the rectangular sections so that the density value indicates a relative magnitude relationship to characteristic values of the analysis target data (step S101). Typical data similar to the distribution shape pattern and reflecting a variation caused between a plurality of the analysis target data are created (step S102). A similarity indicative of a degree between the analysis target data and the typical data is found (step S103). Evaluation is carried out according to the found similarity whether or not the analysis target data are similar to the distribution shape pattern.;COPYRIGHT: (C)2009,JPO&INPIT
机译:解决的问题:提供一种分布分析方法和系统,用于评估具有沿平面分布的特征的分析目标数据是否类似于特定的分布形状图案,即使在测量过程中,也始终可以提供良好的准确评估。分析目标数据受各种因素影响而变化。解决方案:将分布形状图案以网格的形式划分为多个矩形部分,用于定义的分析目标数据的平面,以及一个密度值,该密度值可以在为每个矩形部分定义一定的数字范围,以使密度值指示与分析目标数据的特征值的相对大小关系(步骤S101)。创建类似于分布形状图案并且反映在多个分析目标数据之间引起的变化的典型数据(步骤S102)。找到指示分析目标数据和典型数据之间的程度的相似度(步骤S103)。根据发现的相似性进行评估,以分析目标数据是否与分布形状模式相似。;版权所有:(C)2009,JPO&INPIT

著录项

  • 公开/公告号JP2008258486A

    专利类型

  • 公开/公告日2008-10-23

    原文格式PDF

  • 申请/专利权人 SHARP CORP;

    申请/专利号JP20070100548

  • 发明设计人 IMAI KATSUKI;

    申请日2007-04-06

  • 分类号H01L21/66;G06T1/00;G06T7/00;G01N21/956;

  • 国家 JP

  • 入库时间 2022-08-21 20:24:12

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