Process monitoring device, process monitoring system and program

摘要

PROBLEM TO BE SOLVED: To perform process monitoring in consideration of individual element states.;SOLUTION: A process monitoring device for monitoring a process to be performed at a plant: stores driving data showing at least a physical quantity used in the process and a measurement time at which the physical quantity is measured; stores log data showing at least a content of a past event occurred in the past and an event occurrence time at which the past event occurred; divides history data combining the driving data and the log data, the driving data or the log data by the predetermined time unit to develop a data series; extracts components constituting element states in the process and a constitution ratio of each of the components; analyzes the element states included in the data series and the constitution ratio of each of the element states; and searches the same or similar data series as/to a comparative data series acquired within a predetermined period, of the driving data or the log data.;SELECTED DRAWING: Figure 19;COPYRIGHT: (C)2018,JPO&INPIT