MULTI-LAYER SILICON NITRIDE WAVEGUIDE BASED INTEGRATED PHOTONICS OPTICAL GYROSCOPE CHIP
展开▼
机译:基于多层氮化硅的基于集成光子光学陀螺仪芯片
展开▼
页面导航
摘要
著录项
相似文献
摘要
An integrated photonics optical gyroscope fabricated on a silicon nitride (SiN) waveguide platform comprises a first portion with silicon nitride (SiN) waveguides that constitute a rotation sensing element; and, a second portion with additional silicon nitride (SiN) waveguide-based optical components that constitute a front-end chip to launch light into and receive light from the rotation sensing element. The two portions can be stacked together to have a multi-layer configuration vertically coupled with each other. External elements (e.g., laser, detectors, phase shifter) may be made of different material platform than SiN and can be hybridly integrated to the SiN waveguide platform.
展开▼