MINIATURE DIAPHRAGM-TYPE OPTICAL FIBER END FP PRESSURE SENSOR, MANUFACTURING METHOD THEREFOR AND APPLICATION THEREOF

摘要

A miniature diaphragm-type optical fiber end FP pressure sensor, a manufacturing method therefor and an application thereof. The miniature diaphragm-type optical fiber end FP pressure sensor comprises an optical fiber (1), a hollow core optical fiber (4) and a pressure-sensitive diaphragm (3). The optical fiber (1) and the hollow core optical fiber (4) have the same diameter, and the two are welded by means of an electric arc. A hydrogen-oxygen catalytic bonding method is used to bond the pressure-sensitive diaphragm (3) to an end surface of the hollow core optical fiber (4). Thus, the entire quartz structure of the sensor may be achieved, no organic polymers exist at the joints of the elements, and long-term stability and thermal stability are extremely high. Meanwhile, the described manufacturing method increases the application range and service life of the sensor, and manufacturing costs are also reduced. The described sensor may be applied to the monitoring of parameters such as pressure and sound waves in extreme environments such as high temperature, high pressure, and strong corrosion, and may also be applied to pressure measurement in the situation in the medical and clinical field in which space within the human body is limited.