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MINIATURE DIAPHRAGM-BASED FIBER-OPTIC TIP FP PRESSURE SENSOR, AND FABRICATION METHOD AND APPLICATION THEREOF
MINIATURE DIAPHRAGM-BASED FIBER-OPTIC TIP FP PRESSURE SENSOR, AND FABRICATION METHOD AND APPLICATION THEREOF
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机译:基于微型膜片的光纤尖端FP压力传感器,以及其制造方法及其应用
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摘要
A miniature diaphragm-based fiber-optic tip FP pressure sensor, and fabrication method and application thereof. A miniature diaphragm-based fiber-optic tip FP pressure sensor includes an optical fiber, a hollow-core optical fiber, and a pressure sensing diaphragm, wherein the optical fiber and the hollow-core optical fiber have the same diameter, the two are spliced by arc welding; and the pressure sensing diaphragm is bonded to the endface of the hollow-core optical fiber by hydroxide catalysis bonding. The FP pressure sensor can not only realize the all-silica structure of a sensor, but also make the joint of each component free of organic polymer, and has extremely high long-term stability and thermal stability. Meanwhile, by means of a fabrication method of the miniature diaphragm-based fiber-optic tip FP pressure sensor, the application range and service life of the sensor are increased, and fabrication costs are reduced.
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