METHOD FOR MANUFACTURING A CRYSTALLINE LAYER OF PZT MATERIAL, AND SUBSTRATE FOR EPITAXIAL GROWING A CYRSTALLINE LAYER OF PZT MATERIAL

摘要

A process for producing a crystalline layer of PZT material, comprising the transfer of a monocrystalline seed layer of SrTiO₃ material to a carrier substrate of silicon material, followed by epitaxial growth of the crystalline layer of PZT material.