TACTILE SENSOR ELEMENT, TACTILE SENSOR, TRIAXIAL TACTILE SENSOR, AND TACTILE SENSOR ELEMENT MANUFACTURING METHOD

摘要

Provided are a tactile sensor element, and the like, that make it possible to reduce tactile sensor thickness, measure with a high degree of accuracy by enhancing measurement stability under low stress, and manufacture with a high degree of consistency by reducing differences between individual units in production.　The cross-sectional structure of a tactile sensor element (10) comprises a lower electrode (12), a PEDOT:PSS stress reception layer (14) formed so as to extend over one end side (12r) of the lower electrode (12), and an upper electrode (16) formed on the stress reception layer (14). These components are laminated in close contact. The tactile sensor element (10) is manufactured using a lamination process. When sheer stress is applied in the horizontal direction to the upper electrode (16), a planar overlapping area S where the lower electrode (12) and upper electrode (16) overlap in the vertical direction via the stress reception layer (14) shrinks or grows according to the orientation of the sheer stress, and as a result, the electrical resistance value between the upper electrode (16) and lower electrode (12) increases or decreases. Thus, it is possible to measure the sheer stress applied to the tactile sensor element (10) on the basis of the relationship between the variation in the electrical resistance value and the sheer stress.