Beam steering system based on MEMS driven vertical coupler array

摘要

An integrated optical MEMS driven beam steering system is disclosed, wherein the beam steering system includes a programmable vertical coupler array and lens having a switching network and a vertical coupler array, the switching network allowing the vertical coupler to efficiently emit light into free space. Power can be supplied. The lens collimates the light received from the powered vertical coupler and directs the output beam along the propagation direction determined by the position of the powered vertical coupler in the vertical coupler array. In some embodiments, the vertical coupler is configured to correct for aberration of the lens. In some embodiments, power may be supplied to one or more vertical couplers to steer multiple output beams. In some embodiments, the switching network is non-blocking.