首页> 外国专利> A method for the production of semiconductor zones with precise thickness of between surfaces adhere pn - by means of turns in monocrystalline half conductor bodies of semiconductor components, in particular of three zones transistors

A method for the production of semiconductor zones with precise thickness of between surfaces adhere pn - by means of turns in monocrystalline half conductor bodies of semiconductor components, in particular of three zones transistors

机译:一种用于制造具有在表面之间的精确厚度的半导体区域的方法,该方法通过在半导体部件,尤其是三个区域晶体管的单晶半导体中将pn-粘合在一起

摘要

891,572. Coating with metals. INTERNATIONAL BUSINESS MACHINES CORPORATION. May 12, 1960 [May 28, 1959], No. 16840/60. Class 82(2). [Also in Group XXXVI] A P type monocrystalline germanium wafer shaped as described in Group XXXVI is placed in a sealed chamber 17 with finely divided 0À01 ohm. cm. phosphorus doped N type germanium 18 and germanium iodide as a carrier gas. The finely divided germanium source 18 is maintained at 550‹C., the wafer at 400‹C, and the rest of the chamber at 410‹C. for 48 hours during which the germanium is transported from source 18 and deposited epitaxially at 7 on the wafer.
机译:891,572。用金属涂层。国际商业机器公司。 1960年5月12日[1959年5月28日],编号16840/60。第82(2)类。 [也在第XXXVI组中]将按照在第XXXVI组中所述的形状成形的P型单晶锗晶片放置在具有精细划分的0-101欧姆的密封室17中。厘米。磷掺杂的N型锗18和碘化锗作为载气。细分的锗源18保持在550°C,晶片保持在400°C,其余腔室保持在410°C。保持48小时,在此期间锗从源18被传输并在7处外延沉积在晶片上。

著录项

  • 公开/公告号DE1146982B

    专利类型

  • 公开/公告日1963-04-11

    原文格式PDF

  • 申请/专利权人 IBM;

    申请/专利号DE1960J018210

  • 发明设计人 MARINACE JOHN C;

    申请日1960-05-28

  • 分类号C22B41;C23C16/46;C25F3/12;C30B25/02;H01L21;H01L21/205;H01L29;

  • 国家 DE

  • 入库时间 2022-08-23 17:13:42

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